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  • 姓名: 李世光
  • 性别: 女
  • 职称: 研究员
  • 职务: 副主任
  • 学历: 博士
  • 电话: 15201390426
  • 传真: 
  • 电子邮件: lishiguang@ime.ac.cn
  • 所属部门: 光刻技术总体部
  • 通讯地址: 北京市朝阳区北土城西路3号

    简  历:

  • 教育背景

    1989.09-1993.07        哈尔滨工业大学光学仪器学士 

    1993.09-1996.03        哈尔滨工业大学光学仪器硕士 

    2000.09-2005.07        清华大学光学工程博士 

    工作简历 

    2005.12–2009.11 Singapore-MIT Alliance, SingaporeResearch Fellow 

    2010.03–2011.05 the University of North Carolina, USAPost doctor

    2011.10 – 今 中国科学院微电子研究所副研究员、研究员,其中: 

    2016.02-2019.01外派至中科晶源微电子技术(北京)有限公司做项目经理和项目总监 

    社会任职:

    研究方向:

  • 光刻技术,光电技术,光学工程,光学检测

    承担科研项目情况:

  • [1] EUV 光刻机离轴对焦技术研究与部件开发,课题负责人 

    [2] 光刻精密对焦技术研究,部分期间技术负责人 

    [3] 具有纳米级分辨率的新型位移传感器研制,项目负责人 

    [4] 纳米级硅片检测系统中高度传感器的LED光源的计算机远程控制,项目负责人 

    [5] 86ps动态范围、6比特、高速可编程偏振模色散补偿器,国家863计划项目,核心成员 

    [6] 浸没光刻机系统需求与技术指标分析和评估,国家02专项,核心成员 

    [7] EUVL 技术体系与共性技术研究,国家02专项,部分期间核心成员 

    [8]生产环境中大规模、高产出、基于塑料的微流体器件的测量技术研究,新加坡-麻省理工联盟博士后项目(新加坡),核心成员 

    [9] 光学数字全息术对生物组织的粘弹性研究,北卡罗来纳大学博士后项目(美国),核心成员 

    [10] 电子束检测系统中高度传感器研发,公司合作开发项目,项目经理 

    [11] 大范围、高灵敏度、紧凑型光学滚转角传感器研制,个人兴趣研究

    代表论著:

  • [1]  Zhong Z J, Li C Y, Li S G, Li P H, Ma Q C, Zhao H Y, Zhang J, and Wei Y Y, “High speed, high accuracy displacement extraction from sinusoidal like Moiré fringes in a novel optical encoding technology”, Proc. SPIE Advanced Lithography 2020, accepted. 

    [2]  郭杰,李世光,赵焱,宗明成,“电子束硅片图形检测系统中的纳米级对焦控制技术”,中国光学,20191263):242-255

    [3]  Li S G, Xie D D, Wu Z P, Yang Y H, Zhang J, Guo C X, Pi Y Q, Xiao S X, and Zhao Y”Automatic control of LED light source for wafer height leveling in electron beam imaging systems”Proc.SPIE 10819, 2018: 108190O 

    [4]  孙裕文,李世光,宗明成,“基于空间分光的纳米级调焦调平测量技术”,光学学报,2016365):0512002 

    [5]  孙裕文,李世光,叶甜春,宗明成,“纳米光刻中调焦调平测量系统的工艺相关性”,光学学报,2016368):0812001 

    [6]  Li S G and Oldenburg A, “Measuring soft tissue elasticity by monitoring surface acoustic waves using image plane digital holography”, Proc. SPIE 7965, 2011: 79652M-7962M-7 

    [7]  Li S G, Xu Z G, Yoon S F and Fang Z P, “Feasibility study on bonding quality inspection of microfluidic devices by optics coherence tomography”, J. of Biomedical Opt., 2011, 16(6): 066011 

    [8]  Li S G, Mohan K D, Sanders W W and Oldenburg A L, "Toward soft-tissue elastography using digital holography to monitor surface acoustic waves”, J. of Biomedical Optics, 2011, 16(11): 116005 

    [9]  Li S G, Liu J, Nguyen N T, Fang Z P, and Yoon S F, “Measurement of buried undercut structures in microfluidic devices by laser fluorescent confocal microscopy”, Applied Optics, 2009, 48(33): 6432-6441 

    [10] Li S G, Thorsen T, Xu Z G, Fang Z P, and Yoon S F, “Microvalve Thickness and Topography Measurements in Microfluidic Devices by White Light Confocal Microscopy”, Applied Optics, 2009, 48(27): 5088-94 

    [11] Vijay S*, Bruns D J*, Li S G*, Xu Z G*, Hayden T K, Kamal Y, Fang Z P, Ivan R, and Yoon S F, “Fusion of Metrology Data for High-Volume Large-Scale Manufacturing of Polymer-Based Micro?uidic Devices”, Int. J of Nanomanufacturing, 2009, 3(4): 312 - 336 

    [12] Xu Z G, Li S G, Shilpiekandula V, Taylor H K, Yoon S F, Youcef-Toumi K, Reading I, Fang Z P, Zhao J H, and Boning D S, “Three-Dimensional Profile Stitching Based on the Fiducial Markers for Microfluidic Devices”, Optics Communications, 2009, 282, p493–499 

    [13] Li S G, Xu Z G, Reading I, Yoon S F, Fang Z P and Zhao J H, “Three dimensional sidewall measurements by laser fluorescent confocal microscopy”, Opt. Express, 2008, 16: 4001-4014 

    [14] Li S G, Xu, Z G, Mazzeo A, Burns D J, Fu G, Dirckx M, Shilpiekandula V, Chen X, Nayak N C, Wong E, Yoon S F, Fang Z P, Youcef-Toumi K, Hardt D, Tor S B, Yue C Y and Chun J H, “Review of production of microfluidic devices: material, manufacturing and metrology”, SPIE 6993, 2008: 69930F-1-12 

    [15] Taylor H K, Xu Z G, Li S G, Youcef-Toumi K, Yoon S F, and Boning D S, “Moire fringe method for the measurement of distortions of hot-embossed polymeric substrates”, SPIE 7155, 2008: 715528-715528-9 

    [16] Li S G, Fu Gang, Reading Ivan, Tor S B, Loh N H, Chaturvedi P, Yoon S F, and Youcef-Toumi K, “Dimensional variation in production of high-aspect-ratio micro-pillars array by micro powder injection molding”, Applied Physics A, 2007, 89: 721-728 

    [17] Zhang Y, Yang, C X, and Li S G, “Impact of polarization dependent loss on degree of polarization as feedback signal of polarization mode dispersion”, Chinese Optics Letters 2006, 4(1): 1-3 

    [18] Zhang Y, Yang C X, Li S G, Yan H, Yin J C, Gu C, and Jin G F, “Complete polarization controller based on magneto-optic crystals and fixed quarter wave plates”, Opt. Express, 2006, 14: 3484-3490 

    [19] Yang C X, Zhang Y, and Li S G, “Experimental mitigation of pulse distortion due to higher order polarization mode dispersion”, Proc. SPIE 6025, 2006: 222-227 

    [20] Zhang Y, Li S G, and Yang C X, “Polarization mode dispersion compensation experiments in 10 Gb/s and 40 Gb/s optical communication systems”, Proc. SPIE 6021, 2005: 602122 

    [21] Li S G, Yang C X, and Jin G F, “Simple all-order polarization mode dispersion emulator in DWDM systems”, Proc. SPIE 5625, 2005: 820-827 

    [22] Zhang Y, Li S G and Yang C X, “Compact first and second order polarization mode dispersion emulator”, Chinese Optics Letters, 2005, 3(8): 444-447 

    [23] Li S G, Yang C X, Miao H X, Zhang Y, Zhang E Y, and Jin G F, “Frequency dependence of polarization mode dispersion of crystal-based polarization mode dispersion compensator”, Chin. Phys. Lett., 2005, 22(2): 376-379 

    [24] Li S G, Yang C X, Zhang E Y, and Jin G F, “Dynamic performance of magneto-optical Bi-substituted rare-earth iron garnet”, Chin. Opt. Lett., 2005, 3(1): 38-41 

    [25] Li S G, Yang C X, Zhang E Y, and Jin G F, “Compact optical roll angle sensor with large measurement range and high sensitivity”, Opt. Lett., 2005, 30(3): 242-244 

    [26] Miao H X, Yang C X, Li S G, and Yan Y B, “Feed-forward polarization mode dispersion compensation with a step control algorithm”, Opt. Commun., 2003, 222: 179-189 

    [27] 范志刚,张伟,李世光,金海,“角锥棱镜不同方位反射光束的能量分布”航空计测技术,199554):8-12

    专利申请:

  • 1. 201810343087.0用于确定光栅像在成像平面上的移位的方法和设备和用于确定物体高度的方法和设备,第一作者,发明,申请 

    2. 15972756, USA, Sample height measurement using digital grating,第一作者,发明,申请 

    3. 201810392501.7,用于半导体器件的激光辅助的电子束检测设备和方法,第一作者,发明,申请 

    4. 16113829, USA, Laser-assisted electron-beam inspection for semiconductor devices,第一作者,发明,申请 

    5. 201910313182.0,一种光学硅片检测系统中的对焦控制装置及方法,第二作者,发明,申请 

    6. 201911133007.X,一种新型光栅尺位移测量装置,第二作者,发明,申请 

    7. 201410374962.3 一种调焦调平传感器测量装置,第二作者,发明,授权 

    8. 201410676554.3一种平凸透镜对心安装装置,第四作者,发明,授权 

    9. 201410718598.8  一种垂向调整装置,第五作者,发明,公开 

    10. 201310003089 一种靶源预整形增强的极紫外光发生装置,第四作者,发明,授权 

    11. 201210479101 一种EUV光源污染物收集装置,第三作者,发明,授权 

    12. 201410643329.X,一种光学元件的精密对心粘胶装置,第三作者,发明,授权

    获奖及荣誉: